Excimer SUE
Excimer SUE Series
The excimer modules of the SUE series were specially developed for the stationary treatment of substrates. Among other things, they are particularly suitable for surface cleaning and activation of surfaces of wafers, PCBs and glass. Special areas of application are found in electronics and semiconductor manufacturing as well as sensor production.
The Excimer SUE series is also available in different standard sizes, adapted to common material dimensions. It is characterised by very good homogeneity over the entire radiation surface, without a drop in performance at the edges. A quartz window also ensures a high-purity environment.
Features
- Different standard sizes from 150–300 mm
- Very good homogeneity over the entire radiation area
- Constant intensity mode for stable processes
- Quartz window for high purity environments
Technical data SUE series
- Wavelength (nm): 172
- Intensity (mW/cm²): 10–50
- Lamp lifetime (70 % in h): 1000
- Irradiation size (mm): 150–300
- Homogeneity (%):< ± 10
- Number of excimer emitters: 3–4
- Constant intensity mode: partially available
- Power consumption: (W): 300–1200
- Nitrogen consumption (l/min): 20–50
Application areas:
- Semiconductor industry
- Sensor industry
- Electronics industry
- and many more
Ushio’s latest brochures and product catalogues can be found on our downloads page. For more information on Ushio’s Excimer products, or if you are ready to make a formal enquiry, please fill in the form on our contact page.
Further Reading
Excimer: The Technology Explained
Care222: Anti-Bacterial, Anti-Viral UV Disinfection Solutions
Fraunhofer ILT (Institute for Laser Technology) – PhotonFlex project