Excimer SUE Series
The excimer modules of the SUE series were specially developed for the stationary treatment of substrates. Among other things, they are particularly suitable for surface cleaning and activation of surfaces of wafers, PCBs and glass. Special areas of application are found in electronics and semiconductor manufacturing as well as sensor production.
The Excimer SUE series is also available in different standard sizes, adapted to common material dimensions. It is characterised by very good homogeneity over the entire radiation surface, without a drop in performance at the edges. A quartz disc also ensures a high-purity environment.
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Features
- Different standard sizes from 150 mm to 300 mm
- Very good homogeneity over the entire radiation area
- Constant intensity mode for stable processes
- Quartz window for high purity environments
Technical data SUE
- Wavelength (nm): 172
- Intensity (mW/cm²): 10 - 50
- Lamp lifetime (70 % in h): 1000
- Irradiation size (mm): □ 150 - 300
- Homogeneity (%):< ± 10
- Number of excimer emitters: 3 - 4
- Constant intensity mode: partially available
- Power consumption: (W): 300 - 1200
- Nitrogen consumption (l/min): 20 - 50
Applications
- Semiconductor industry
- Sensor industry
- Electronics industry
- and many more